DESCRIPTION Thesensorelementof theMS7912consistsofasmallsiliconmicro-machinedmembranewithaPyrexglassmounted under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressuresensor(MS7912A)carriesasealedvacuumreferencecavityunderneaththemembranewhereasthedifferentiasensor(MS7912D)hasaholeinthePyrexglassatthebacksideofthesensor. FEATURES · Uncompensatedpressuresensordie · Linearity0.05%(typical)· OutputSpan150mV@5V · SmallDieSize1.72x1.58mm· TemperatureRange-40°…+125°C · LowCost,Highreliability APPLICATION · Forabsoluteordifferentialpressuresensorsystems· Enginecontrols· Divecomputers